Electroplating-based Approaches to Volumetric Nanomanufacturing

This paper focuses on electroplating-based volumetric nanomanufacturing to create highly-structured multilayer metallic materials, with precisely designed characteristic lengths in the hundreds of nanometers but volumes of manufactured material in the macro range. This electroplating-based approach also enables batch fabrication of nanostructures. The fabrication relies on automated and repeated multilayer electrodepositions of multiple metallic materials, followed by sacrificial etching of one metal. The remaining structure consists of individualized high-lateral-aspect-ratio sub-micron metallic films. As an example application, energy storage directly benefits from these approaches as nanostructuring improves specific energy storage performance and increasing volume improves the total amount of energy stored.